BUARABADTHONG , P.; PASAJA, N. The Carbon Ion Energy Measurement in Pulse Filtered Cathodic Vacuum Arc Plasma Source for Study the Influence of Negative Substrate Bias Voltage. Burapha Science Journal, Chonburi, Thailand, v. 27, n. 1 January-April, p. 300–315, 2026. Disponível em: https://li05.tci-thaijo.org/index.php/buuscij/article/view/1339. Acesso em: 2 sep. 2026.